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Hybrid Coupling of Laser Light sources to Silicon (Oxy)Nitride Based Waveguides


Author: Krijger, A.J.T. de · Bekman, H.H.P.T.
Publisher: SPIE
Place: Bellingham, WA.
Institution: TNO Fysisch en Elektronisch Laboratorium
Source:Parriaux, O.M.Kley, Ernst-BernardCulshaw, B.Breidne, M., Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, 18-20 June 1997, Munich, FRG, 137-148
Proceedings of SPIE
Identifier: 95010
doi: doi:10.1117/12.281219
Report number: SPIE-3099
Keywords: Integrated optics · Sensor · Diode laser · Glass optical waveguides · Thermocompression · Hybrids · Reactive ion etching


An efficient method was developed to couple a diode laser to a high contrast waveguides. The laserdiodes were mounted with sub-micron precision using a thermocompression mounting technique. An AlGaAs (λ = 850 nm) laserdiode was coupled to a SiON based slab waveguide (efficiency η EQ 25 - 30%) and to a Si2N4 based ridge waveguide (efficiency η = 20%) on silicon. A start has been made with the determination of the lifetime of thermocompression mounted laserdiodes. AlGaAs (λ = 850 nm) lasers as well as AlGaInP (λ = 675 nm) lasers were tested. The first results indicate that lifetimes in the range 10 - 30 years are possible for CW operation at 30°C. The laser- waveguide coupling technique is demonstrated in a sensor platform.