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Feasibility study of photo thermal acoustic imaging of buried nanowires in Gate-All-Around (GAA) nanowire FETs

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Author: Neer, P.L.M.J. van · Piras, D. · Koek, W. · Zwet, E. van · Marnani, H.S.
Type:article
Date:2017
Publisher: IEEE Computer Society
Source:2017 IEEE International Ultrasonics Symposium, IUS 2017. 6 September 2017 through 9 September 2017
Identifier: 782914
ISBN: 9781538633830
Article number: 8092003
Keywords: OM - Opto-Mechatronics AS - Acoustics & Sonar OPT - Optics · 2015 Nano Technology 2015 Observation, Weapon & Protection Systems 2015 Nano Technology