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Advanced defect classification by optical metrology

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Author: Maas, D.J.
Type:article
Date:2017
Source:5th Workshop on Nano-fabrication, -devices and -metrology, 19-20 June 2017, Eindhoven, The Netherlands
Identifier: 779165
Keywords: Nanotechnology · High Tech Systems & Materials · Industrial Innovation · Nano Technology · NI - Nano Instrumentation · TS - Technical Sciences

Abstract

The goal of the workshop is to provide a high level, invited only, international community that accelerates interactions between the main target groups: universities, institutes, entrepreneurs, intrapreneurs and investors in order to facilitate customer development, application discovery or funding start-ups & spin-offs to expand internationally. To interconnect and bring more transparency to Europe’s regional physics/chemistry clusters and innovative regional communities (such as MicronArc, MinaLogic, InPlas, NanoNextNL, MinacNed) and finally to build stronger scientific and business relationships in between.