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Results from the Large Dynamic Range Atomic Force Microscope

Author: Peters, J. · Herfst, R. · Witvoet, G. · Kuiper, S. · Es, M.H. van · Willekers, R.W.
Type:report
Date:2019
Publisher: TNO
Place: Delft
Source:SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Identifier: 867652
Keywords: Telescopes · Large Dynamic Range Atomic Force Microscope · LDR-AFM · ERP Early Research Program · ERP 3D Nanomanufacturing Instruments · High Tech Systems & Materials · Industrial Innovation

Abstract

TNO developed a novel Large Dynamic Range Atomic Force Microscope (LDRAFM), designed for sub-nm accurate metrology. The current work provides an overview of recent developments and presents the results obtained after final integration of the complete system. Results indicate impressive stability over long range, enabling subnm metrology opportunities.