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Silicon on insulator photonic integrated sensors: on-chip sensing and interrogation

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Author: Pozo Torres, J.M. · Westerveld, W. · Harmsma, P.J. · Yang, S. · Bodis, P. · Nieuwland, R. · Lagioia, M. · Lo Cascio, D.M.R. · Staats, J. · Schmits, R. · Berg, H.V.D. · Tabak, E. · Green, K. · Urbach, H.P. · Cheng, L.K. · Yousefi, M.
Source:Proceedings International Conference on Transparent Optical Networks (ICTON), 1-4
Identifier: 436211
ISBN: 978-1-4577-0881-7
Article number: 5970854
Keywords: Physics · silicon-on-insulator · photonic sensing · SOI · on chip interrogation · ring resonators · pressure sensor · strain sensor · ultrasound sensor · harsh environments · 3x3 interferometer · Physics & Electronics · NI - Nano Instrumentation · TS - Technical Sciences


In this paper, we present two examples of photonic sensors based on ring resonators in Silicon-on-Insulator (SOI) waveguide technology as mass production compatible sensing units for the measurement of: strain, and ultrasound. Furthermore, the sensing units are characterized in extreme conditions to validate their robustness in harsh industrial environments. In addition, the monitoring of these sensing units is presented as an application of an on-chip 3x3 interferometer.