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Robust giant magnetoresistive effect type multilayer sensor

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Author: Lenssen, K.M.H. · Kuiper, A.E.T. · Roozeboom, F.
Institution: TNO Industrie
Identifier: 520105
Report number: 6.501.271
Keywords: Physics Electronics · Industrial Innovation


A robust Giant Magneto Resistive effect type multilayer sensor comprising a free and a pinned ferromagnetic layer, which can withstand high temperatures and strong magnetic fields as required in automotive applications. The GMR multi-layer has an asymmetric magneto-resistive curve and enables sensors with complementary output signals so that a Wheatstone bridge is possible. The improvement is obtained by a combination of measures including the use of a combination of an Artificial Anti Ferromagnet as the pinned layer and an IrMn exchange-biasing layer, the latter preferably arranged at the bottom of the layer stack on top of a buffer layer.