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3D Nanomanufacturing and Nanometrology

Publisher: TNO
Place: Delft
Identifier: 850576
Keywords: Nanotechnology · High Tech Systems & Materials · Industrial Innovation · Physics & Electronics · NI - Nano Instrumentation · TS - Technical Sciences


Further scaling and miniaturization of nanodevices (nanoelectronics, Quantum devices bio-nano devices for healthcare) brings major manufacturing, metrology and characterization challenges that cannot be met anymore by current techniques. The High Volume Manufacturing industry requires, more than ever, metrology methods that routinely measure structural and material parameters at atomic level in nm-sized structures, with atomic precision, with high throughput, for an ever increasing set of combinations of new materials in 3D structures. The research program 3D nanomanufacturing will enable the transition from 2D to 3D nanostructures, that will support the need for ever more powerful devices. The focus is on the development of instruments and techniques which enable manufacturing and metrology of nanostructures at the very high speeds, accuracies and reliabilities required for industrial applications.