Opto-electronic MEMS oscillator for resonant pressure sensing

Master thesis (2014)

Authors

Contributors

P.M. Sarro (mentor)
P.G. Steeneken (mentor)
Department
Microelectronics & Computer Engineering (EEMCS) (TU Delft)
Copyright: © 2014 Kumar, L.
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Published Date

18-07-2014

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics & Computer Engineering

Abstract

This thesis details the design of a self-oscillating MEMS resonator as a pressure sensor. A bi-layer circular diaphragm with a single center perforation is used as a pressure sensitive membrane which measures the absolute pressure of the surrounding medium. A novel aspect of the proposed sensor is that the resonator is made to oscillate by an opto-electronic feedback loop. The membrane is driven electrostatically and it’s motion is sensed optically. The optical read-out system measures the velocity of the driven membrane which is subsequently converted into electrical signals for actuation. The proposed opto-electronic MEMS oscillator uses Laser Doppler Vibrometry for detection as well as signal conversion and amplification which to our knowledge has not been reported so far.