Print Email Facebook Twitter Electron microscope and method of estimating defocus therefor Title Electron microscope and method of estimating defocus therefor Author Tejada Ruiz, A. Den Dekker, A.J. Faculty Mechanical, Maritime and Materials Engineering Department Precision and Microsystems Engineering Date 2012-08-28 To reference this document use: http://resolver.tudelft.nl/uuid:3e0f8e5f-dccf-4fad-bea1-5f45b00e46ae Publisher European Patent Office Source http://worldwide.espacenet.com/publicationDetails/biblio?CC=NL&NR=2006300C&KC=C&FT=D&ND=3&date=20120828&DB=EPODOC&locale=en_EP Source NL 2006300 (C) Part of collection Institutional Repository Document type patent Rights (c) 2012 The Author(s) Files PDF NL2006300C.pdf 1.09 MB Close viewer /islandora/object/uuid:3e0f8e5f-dccf-4fad-bea1-5f45b00e46ae/datastream/OBJ/view