Print Email Facebook Twitter A hybrid silicon-PDMS optofluidic platform for sensing applications Title A hybrid silicon-PDMS optofluidic platform for sensing applications Author Testa, G. Persichetti, G. Sarro, P.M. Bernini, R. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2014-01-09 Abstract A hybrid silicon-poly(dimethysiloxane) (PDMS) optofluidic platform for lab-on-a-chip applications is proposed. A liquid-core waveguide with a self-aligned solid-core waveguide and a microfluidic device are integrated with a multilayer approach, resulting in a three-dimensional device assembly. The optofluidic layer was fabricated with a hybrid silicon-polymer technology, whereas the microfluidic layer was fabricated with a soft lithography technique. The combination of different materials and fabrication processes allows a modular approach, enabling both the benefits from the high optical quality achievable with silicon technology and the low cost of polymer processing. The proposed chip has been tested for fluorescence measurements on Cy5 water solutions, demonstrating the possibility to obtain a limit of detection of 2.5 nM. Subject integrated opticsmicro-optical devicesoptical sensing and sensors To reference this document use: http://resolver.tudelft.nl/uuid:665e7616-fed1-49d1-83e2-0d0dd33d7432 DOI https://doi.org/10.1364/BOE.5.000417 Publisher Optical Society of America ISSN 2156-7085 Source http://www.opticsinfobase.org/boe/abstract.cfm?URI=boe-5-2-417 Source Biomedical Optics Express, 5 (2), 2014 Part of collection Institutional Repository Document type journal article Rights © 2014 Optical Society of America Files PDF Sarro_2014.pdf 1.27 MB Close viewer /islandora/object/uuid:665e7616-fed1-49d1-83e2-0d0dd33d7432/datastream/OBJ/view