Print Email Facebook Twitter A hybrid inertial sensor for measuring absolute displacement Title A hybrid inertial sensor for measuring absolute displacement Author Klein Horsman, F. Contributor Spronck, J.W. (mentor) Vogel, J.G. (mentor) Faculty Mechanical, Maritime and Materials Engineering Department Precision and Microsystems Engineering Programme Mechatronic System Design Date 2016-03-10 Abstract Vibrations can be a limiting factor in systems working with nanometer precision. Inertial sensors are used to measure these vibrations. This thesis presents a hybrid inertial sensor using both a displacement and velocity measurement on a single mass-spring system. The measurements are combined into one output of absolute displacement. A demonstrator was build and experimentally tested. The hybrid inertial sensor has benefits in terms of noise, bandwidth, size and cost, compared to inertial sensors using a single readout. As an addition, also a hybrid measurement method in a 3-DoF motion stage is shown, using position sensors and an accelerometer. The same method as used with the hybrid inertial sensor combines the signals into one hybrid measurement. It results in an improved precision. Subject inertial sensorsvibrationsabsolute displacementhybridgeophoneaccelerometermotion stage To reference this document use: http://resolver.tudelft.nl/uuid:6bd7b6cf-8b48-41b4-a179-50b0c3774afe Embargo date 2017-03-10 Coordinates 52.0009988, 4.3718819 Part of collection Student theses Document type master thesis Rights (c) 2016 Klein Horsman, F. Files PDF MSc_thesis_A_hybrid_inert ... cement.pdf 35.22 MB Close viewer /islandora/object/uuid:6bd7b6cf-8b48-41b4-a179-50b0c3774afe/datastream/OBJ/view