Print Email Facebook Twitter Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample Title Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample Author Abedzadeh, Navid (Massachusetts Institute of Technology) Krielaart, M.A.R. (TU Delft ImPhys/Microscopy Instrumentation & Techniques) Kim, Chung Soo (Massachusetts Institute of Technology) Simonaitis, John (Massachusetts Institute of Technology) Hobbs, Richard (Trinity College Dublin) Kruit, P. (TU Delft ImPhys/Microscopy Instrumentation & Techniques) Berggren, Karl K. (Massachusetts Institute of Technology) Date 2021 Abstract The use of electron mirrors in aberration correction and surface-sensitive microscopy techniques such as low-energy electron microscopy has been established. However, in this work, by implementing an easy to construct, fully electrostatic electron mirror system under a sample in a conventional scanning electron microscope (SEM), we present a new imaging scheme which allows us to form scanned images of the top and bottom surfaces of the sample simultaneously. We believe that this imaging scheme could be of great value to the field of in-situ SEM which has been limited to observation of dynamic changes such as crack propagation and other surface phenomena on one side of samples at a time. We analyze the image properties when using a flat versus a concave electron mirror system and discuss two different regimes of operation. In addition to in-situ SEM, we foresee that our imaging scheme could open up avenues towards spherical aberration correction by the use of electron mirrors in SEMs without the need for complex beam separators. Subject Aberration correctionElectron mirrorIn-situ SEMSEM To reference this document use: http://resolver.tudelft.nl/uuid:6c4223c1-10e0-4df2-bd52-b8eb7aefafed DOI https://doi.org/10.1016/j.ultramic.2021.113304 Embargo date 2022-05-05 ISSN 0304-3991 Source Ultramicroscopy, 226 Bibliographical note Accepted Author Manuscript Part of collection Institutional Repository Document type journal article Rights © 2021 Navid Abedzadeh, M.A.R. Krielaart, Chung Soo Kim, John Simonaitis, Richard Hobbs, P. Kruit, Karl K. Berggren Files PDF Mirror_paper_Ultramicrosc ... ions_2.pdf 9.68 MB Close viewer /islandora/object/uuid:6c4223c1-10e0-4df2-bd52-b8eb7aefafed/datastream/OBJ/view