Print Email Facebook Twitter Design and fabrication of stiff silicon probes: A step towards sophisticated cochlear implant electrodes Title Design and fabrication of stiff silicon probes: A step towards sophisticated cochlear implant electrodes Author Lawand, N.S. French, P.J. Briare, J.J. Frijns, J.H.M. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2011-09-04 Abstract Cochlear implants work on the principle of direct electrical stimulation of the auditory nerve. It has advantages to replace their traditional wired electrodes by a high-density thin-film multielectrode stimulation array which is relatively small in dimensions, stable, resistant to electrolysis, and offers batch fabrication capabilities with good electrical and mechanical properties. In this paper a development review of cochlear implants (CI's) along with the fabrication of stiff silicon probes using silicon micromachining is described. The initial design for a new microelectrode array is described with microfabrication steps for stiff silicon probes which is a step towards a future flexible CI-electrodes. These stiff probes were fabricated in order to study the problems involved in fabrication and the behaviour of the probes when inserted perpendicular to the auditory nerve. The probes were fabricated with lengths ranging from 3.5 mm to 10.5 mm with thickness between 60 to 70 microns. Subject cochlear auditory prosthesiselectrical stimulationstiff probessilicon micormachining To reference this document use: http://resolver.tudelft.nl/uuid:6ea1b6f8-aea0-467b-8ea1-85a6f10afa89 DOI https://doi.org/10.1016/j.proeng.2011.12.249 Publisher Elsevier ISSN 1877-7058 Source Procedia Engineering, 25, 2011 Part of collection Institutional Repository Document type journal article Rights © 2011 Elsevier Files PDF Lawand_2011.pdf 583.86 KB Close viewer /islandora/object/uuid:6ea1b6f8-aea0-467b-8ea1-85a6f10afa89/datastream/OBJ/view