Print Email Facebook Twitter Micro-electromechanical system Title Micro-electromechanical system Author Tolou, N. Herder, J.L. Faculty Mechanical, Maritime and Materials Engineering Department Biomechanical Engineering Date 2012-02-02 Abstract Micro-electromechanical system (MEMS) comprising a substrate or substrate parts, and a compliant first segment or segments within the substrate or substrate parts with a predefined positive stiffness, wherein the first segment or segments is or are statically balanced. This is embodied by applying a second segment or segments within the substrate or substrate parts that provide a balancing force to the first segment or segments so as to counteract at least in a predefined working range of the first segment or segments the said predefined positive stiffness. To reference this document use: http://resolver.tudelft.nl/uuid:7be14e91-5e19-4d82-8da4-28111fd447de Publisher European Patent Office Source http://worldwide.espacenet.com/publicationDetails/biblio?DB=EPODOC&II=16&ND=3&adjacent=true&locale=en_EP&FT=D&date=20120202&CC=WO&NR=2012015301A2&KC=A2 Source WO 2012015301 (A2) Part of collection Institutional Repository Document type patent Rights (c) 2012 The Author(s) Files PDF WO2012015301A21.pdf 1016.82 KB Close viewer /islandora/object/uuid:7be14e91-5e19-4d82-8da4-28111fd447de/datastream/OBJ/view