Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus

Title

Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus

 Author

Kruit, P.
Hoogenboom, J.P.
Zonnevylle, A.C.

Faculty

Applied Sciences

 Department

IST/Imaging Science and Technology

 Date

2012-01-17

 Abstract

An inspection apparatus is provided comprising in combination at least an optical microscope and an ion- or electron microscope equipped with a source for emitting a primary beam of radiation to a sample in a sample holder. The apparatus may comprise a detector for detection of secondary radiation backscattered from the sample and induced by the primary beam. The optical microscope is equipped with an light collecting device to receive in use luminescence light emitted by the sample and to focus it on a photon-detector.

 To reference this document use:

http://resolver.tudelft.nl/uuid:7f0dfeb7-3bed-49bb-8734-3f1763561191

 Publisher

European Patent Office

 Source

http://worldwide.espacenet.com/publicationDetails/biblio?CC=WO&NR=2012008836A2&KC=A2&FT=D&ND=4&date=20120119&DB=EPODOC&locale=en_EP

 Source

WO 2012008836 (A2); WO 2012008836 (A3)

 Part of collection

Institutional Repository

 Document type

patent

 Rights

(c) 2012 The Author(s)
Files
PDF WO2012008836A21.pdf 1.38 MB
PDF WO2012008836A31.pdf 244.22 KB
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