Print Email Facebook Twitter A proof-of-concept on Adaptive Control for High-Speed Atomic Force Microscopy Title A proof-of-concept on Adaptive Control for High-Speed Atomic Force Microscopy Author van der Maarel, Stefan (TU Delft Mechanical, Maritime and Materials Engineering) Contributor Verbiest, G.J. (mentor) Noom, J. (mentor) Smith, C.S. (mentor) Alijani, F. (graduation committee) Degree granting institution Delft University of Technology Programme Mechanical Engineering | Precision and Microsystems Engineering | High-Tech Engineering Date 2022-12-09 Abstract High-Speed Atomic Force Microscopy is widely used for investigating biological architectures and the semiconductor industry. The main limitation comes from parachuting or the Wile E. Coyote effect. Parachuting is the phenomenon where the cantilever taps on the sample towards a steep decrease in height, but does not get adjusted for this decrease fast enough, resulting in poor imaging quality at higher scan speeds. A proof-of-concept has been modeled for an adaptive raster scanning methodology on the X and Y piezo actuators. There will be investigated how a variable scan speed can decrease the effect of parachuting and thereby improve the spatial resolution. A detection algorithm is designed to measure the parachuting and uphill events at high scanning speed as accurately and precisely as possible during the forward scan. This has been done by defining a mixed signal that multiplies the first and second derivatives of the filtered deflection signal. A variable scan speed will be applied for the backward scan. The detection algorithm turned out to have a very high repeatability of 97.1% for the uphill events, and 93.6% for the parachuting events. Its accuracy turned out to have a maximum deviation of one signal period, which has been accounted for within the controller. Implementing this for the adaptive controller results in an improvement in both resolution and time efficiency. The adaptive controller is up to 9.5 times more accurate and time efficient compared to conventional methods. Subject Atomic Force MicroscopyAFMHS-AFMHigh-Speed Atomic Force MicroscopyAdaptive ControlVariable SpeedParachutingSpatial Resolution To reference this document use: http://resolver.tudelft.nl/uuid:89c50252-9d6a-4653-a252-4407e4661e58 Part of collection Student theses Document type master thesis Rights © 2022 Stefan van der Maarel Files PDF Thesis_StefanvdMaarel_HTE.pdf 6.11 MB Close viewer /islandora/object/uuid:89c50252-9d6a-4653-a252-4407e4661e58/datastream/OBJ/view