Print Email Facebook Twitter Integrated MEMS: Opportunities & Challenges Title Integrated MEMS: Opportunities & Challenges Author French, P.J. Sarro, P.M. Faculty Electrical Engineering, Mathematics and Computer Science Department Micro-elektronica Date 2012-02-02 To reference this document use: http://resolver.tudelft.nl/uuid:969573cc-1092-4121-8654-cd63617b253b DOI https://doi.org/10.5772/31493 Publisher InTech Source http://www.intechopen.com/books/micromachining-techniques-for-fabrication-of-micro-and-nano-structures/smart-sensors-advantages-and-pitfalls Source Micromachining Techniques for Fabrication of Micro and Nano Structures, ISBN: 978-953-307-906-6 Part of collection Institutional Repository Document type book chapter Rights (c) 2012 French, P.J.Sarro, P.M. Files PDF InTech-Integrated_mems_op ... lenges.pdf 1.15 MB Close viewer /islandora/object/uuid:969573cc-1092-4121-8654-cd63617b253b/datastream/OBJ/view