Print Email Facebook Twitter Suspended AlGaN/GaN HEMT NO2 Gas Sensor Integrated with Micro-heater Title Suspended AlGaN/GaN HEMT NO2 Gas Sensor Integrated with Micro-heater Author Sun, J. (TU Delft Electronic Components, Technology and Materials; China Research Institute) Sokolovskij, R. (TU Delft Electronic Components, Technology and Materials; Southern University of Science and Technology; State Key Laboratory of Solid State Lighting) Iervolino, E. (TU Delft Electronic Components, Technology and Materials) Liu, Zewen (Tsinghua University) Sarro, Pasqualina M (TU Delft Electronic Components, Technology and Materials) Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials) Date 2019-12-01 Abstract We developed an AlGaN/GaN high electron mobility transistor (HEMT) sensor with a tungsten trioxide (WO3) nano-film modified gate for nitrogen dioxide (NO2) detection. The device has a suspended circular membrane structure and an integrated micro-heater. The thermal characteristic of the Platinum (Pt) micro-heater and the HEMT self-heating are studied and modeled. A significant detection is observed for exposure to a low concentration of 100 ppb NO2 /N2 at ∼300 °C. For a 1 ppm NO2 gas, a high sensitivity of 1.1% with a response (recovery) time of 88 second (132 second) is obtained. The effects of relative humidity and temperature on the gas sensor response properties in air are also studied. Based on the excellent sensing performance and inherent advantages of low power consumption, the investigated sensor provides a viable alternative high performance NO2 sensing applications. It is suitable for continuous environmental monitoring system or high temperature applications. Subject GaNHEMTmicro-heaterNO sensorWO To reference this document use: http://resolver.tudelft.nl/uuid:a6d85734-05ae-4808-ab45-51a4dbd424f0 DOI https://doi.org/10.1109/JMEMS.2019.2943403 Embargo date 2021-08-02 ISSN 1057-7157 Source IEEE Journal of Microelectromechanical Systems, 28 (6), 997-1004 Bibliographical note Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type journal article Rights © 2019 J. Sun, R. Sokolovskij, E. Iervolino, Zewen Liu, Pasqualina M Sarro, Kouchi Zhang Files PDF 08856274.pdf 2.64 MB Close viewer /islandora/object/uuid:a6d85734-05ae-4808-ab45-51a4dbd424f0/datastream/OBJ/view