Title
Towards a Microfabricated Flexible Graphene-Based Active Implant for Tissue Monitoring During Optogenetic Spinal Cord Stimulation
Author
Velea, A. (TU Delft Bio-Electronics)
Vollebregt, S. (TU Delft Electronic Components, Technology and Materials)
Hosman, T.B. (TU Delft Bio-Electronics; Fraunhofer Institute for Reliability and Microintegration IZM)
Pak, A. (TU Delft Bio-Electronics; Fraunhofer Institute for Reliability and Microintegration IZM)
Giagka, Vasiliki (TU Delft Bio-Electronics; Fraunhofer Institute for Reliability and Microintegration IZM)
Date
2020-10
Abstract
This work aims to develop a smart neural interface with transparent electrodes to allow for electrical monitoring of the site of interest during optogenetic stimulation of the spinal cord. In this paper, a microfabrication process for the wafer-level development of such a compact, active, transparent and flexible implant is presented. Graphene has been employed to form the transparent array of electrodes and tracks, on top of which chips have been bonded using flip-chip bonding techniques. To provide high flexibility, soft encapsulation, using polydimethylsiloxane (PDMS) has been used. Making use of the "Flex-to-Rigid" (F2R) technique, cm-size graphene-on-PDMS structures have been suspended and characterized using Raman spectroscopy to qualitatively evaluate the graphene layer, together with 2-point measurements to ensure the conductivity of the structure. In parallel, flip-chip bonding processes of chips on graphene structures were employed and the 2-point electrical measurement results have shown resistance values in the range of kΩ for the combined tracks and ball-bonds.
Subject
Graphene
Neural interface
Optogenetic stimulation
PDMS
Transparent active implant
To reference this document use:
http://resolver.tudelft.nl/uuid:ca9f0b8a-75c5-46b8-8399-9ddef22d0ff8
DOI
https://doi.org/10.1109/NMDC47361.2019.9084021
Publisher
IEEE
Embargo date
2021-12-06
ISBN
978-1-7281-2637-1
Source
2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019
Event
2019 IEEE 14th Nanotechnology Materials and Devices Conference (NMDC), 2019-10-27 → 2019-10-30, Stockholm, Sweden, Stockholm, Sweden
Series
2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019
Bibliographical note
Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Part of collection
Institutional Repository
Document type
conference paper
Rights
© 2020 A. Velea, S. Vollebregt, T.B. Hosman, A. Pak, Vasiliki Giagka