Print Email Facebook Twitter Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP Title Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP Author Carlström, C.F. Van Der Heijden, R. Karouta, F. Van Der Heijden, R.W. Salemink, H.W.M. Van der Drift, E. Faculty Applied Sciences Department Kavli Institute of Nanoscience Delft Date 2006 To reference this document use: http://resolver.tudelft.nl/uuid:d4e84b9a-9244-4aa4-bd74-97464717bbd8 Source Journal of vacuum science and technology B, 24 (1) Part of collection Institutional Repository Document type journal article Rights (c) 2006 Carlström, C.F.Van Der Heijden, R.Karouta, F.Van Der Heijden, R.W.Salemink, H.W.M.Van Der Drift, E. Files PDF 2006-1.pdf 371.3 KB Close viewer /islandora/object/uuid:d4e84b9a-9244-4aa4-bd74-97464717bbd8/datastream/OBJ/view