Print Email Facebook Twitter Nebula Title Nebula: Monte Carlo simulator of electron–matter interaction Author van Kessel, L.C.P.M. (TU Delft ImPhys/Microscopy Instrumentation & Techniques) Hagen, C.W. (TU Delft ImPhys/Microscopy Instrumentation & Techniques) Date 2020 Abstract Monte Carlo simulations are frequently used to describe electron–matter interaction in the 0–50 keV energy range. It often takes hours to simulate electron microscope images using first-principle physical models. In an attempt to maintain a reasonable speed, empirical models are sometimes used. We present an open-source software package with first-principle physical models, which can run on GPUs for fast results. Typical electron microscope images can be obtained in minutes instead of hours on consumer-grade hardware, without any loss of accuracy. Subject Electron scatteringGPULithographyMetrologyMonte Carlo simulationSEM To reference this document use: http://resolver.tudelft.nl/uuid:d5740b54-6c37-4598-af70-67268d71696e DOI https://doi.org/10.1016/j.softx.2020.100605 ISSN 2352-7110 Source SoftwareX, 12 Part of collection Institutional Repository Document type journal article Rights © 2020 L.C.P.M. van Kessel, C.W. Hagen Files PDF 1_s2.0_S2352711020303186_main.pdf 1 MB Close viewer /islandora/object/uuid:d5740b54-6c37-4598-af70-67268d71696e/datastream/OBJ/view