Print Email Facebook Twitter Characterization of an Acetone Detector based on a Suspended WO3-Gate AlGaN/GaN HEMT Integrated with Micro-heater Title Characterization of an Acetone Detector based on a Suspended WO3-Gate AlGaN/GaN HEMT Integrated with Micro-heater Author Sun, J. (TU Delft Electronic Components, Technology and Materials; Chinese Research Institute) Sokolovskij, R. (TU Delft Electronic Components, Technology and Materials; Southern University of Science and Technology) Iervolino, E. (USound Shenzhen Office) Santagata, F. (Shenzhen 3NOD Acousticlink Company,) Liu, Zewen (Tsinghua University) Sarro, Pasqualina M (TU Delft Electronic Components, Technology and Materials) Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials) Date 2019 Abstract A suspended AlGaN/GaN high electron mobility transistor (HEMT) sensor with a tungsten trioxide (WO 3 ) nanofilm modified gate was microfabricated and characterized for ppm-level acetone gas detection. The sensor featured a suspended circular membrane structure and an integrated microheater to select the optimum working temperature. High working temperature (300°C) increased the sensitivity to up to 25.7% and drain current change I DS to 0.31 mA for 1000-ppm acetone in dry air. The transient characteristics of the sensor exhibited stable operation and good repeatability at different temperatures. For 1000-ppm acetone concentration, the measured response and recovery times reduced from 148 and 656 to 48 and 320 s as the temperature increased from 210 °C to 300 °C. The sensitivity to 1000-ppm acetone gas was significantly greater than the sensitivity to ethanol, ammonia, and CO gases, showing low cross-sensitivity. These results demonstrate a promising step toward the realization of an acetone sensor based on the suspended AlGaN/GaN HEMTs. Subject Acetone sensorAlGaN/GaNWO₃gas sensorhigh electron mobility transistor (HEMT) To reference this document use: http://resolver.tudelft.nl/uuid:d75c9dad-a536-453d-81a6-4888a325f851 DOI https://doi.org/10.1109/TED.2019.2936912 Embargo date 2021-08-02 ISSN 0018-9383 Source IEEE Transactions on Electron Devices, 66 (10), 4373-4379 Bibliographical note Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type journal article Rights © 2019 J. Sun, R. Sokolovskij, E. Iervolino, F. Santagata, Zewen Liu, Pasqualina M Sarro, Kouchi Zhang Files PDF Characterization_of_an_Ac ... heater.pdf 2.54 MB Close viewer /islandora/object/uuid:d75c9dad-a536-453d-81a6-4888a325f851/datastream/OBJ/view