Chemical vapor deposition of thin films of mixed conductors

Title

Chemical vapor deposition of thin films of mixed conductors

Author

Van Zomeren, A.A.
Koegler, J.H.
Van der Put, P.J.
Schoonman, J.

Date

1992

Subject

crystn CVD film mixed conductor titanium sulfide vapor deposition molybdenum sulfide vapor deposition

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ISSN

0167-2738

Source

Solid state ionics, 521-525. (1992)

Part of collection

Institutional Repository

Document type

journal article