Print Email Facebook Twitter A 117DB in-Band CMRR 98.5DB SNR Capacitance-to-Digital Converter for Sub-NM Displacement Sensing with an Electrically Floating Target Title A 117DB in-Band CMRR 98.5DB SNR Capacitance-to-Digital Converter for Sub-NM Displacement Sensing with an Electrically Floating Target Author Jiang, H. (TU Delft Electronic Instrumentation) Amani, Samira (Student TU Delft) Vogel, J.G. (TU Delft Electronic Instrumentation) Heidary Shalmany, S. (TU Delft Electronic Instrumentation) Nihtianova, S. (TU Delft Electronic Instrumentation) Date 2018 Abstract This paper describes a high-performance Capacitance-to-Digital Converter (CDC) for sub-nm displacement sensing with an electrically floating target. Intended to be integrated into a displacement sensor probe, the CDC consumes only 560μW. It achieves 98.5dB SNR in a 1ms conversion time, which is 34 times more energy-efficient than the prior art. Moreover, it also offers a 117dB in-band (1kHz) Common-mode Rejection Ratio (CMRR), providing decent electric field interference immunity. Subject SensorsElectrodesInterferenceEnergy efficiencyElectric fieldsCapacitorsSignal to noise ratio To reference this document use: http://resolver.tudelft.nl/uuid:e1f7e0af-91e8-4d2d-bed0-969e37c9d1d8 DOI https://doi.org/10.1109/VLSIC.2018.8502363 Publisher IEEE, Piscataway, NJ ISBN 978-1-5386-4214-6 Source 2018 Symposium on VLSI Circuits Digest of Technical Papers, 2018-June Event 2018 Symposia on VLSI Technology and Circuits, 2018-06-18 → 2018-06-22, Hilton Hawaiian Village, Honolulu, United States Part of collection Institutional Repository Document type conference paper Rights © 2018 H. Jiang, Samira Amani, J.G. Vogel, S. Heidary Shalmany, S. Nihtianova Files PDF 1_manuscrip.pdf 1.77 MB Close viewer /islandora/object/uuid:e1f7e0af-91e8-4d2d-bed0-969e37c9d1d8/datastream/OBJ/view