Title
Temperature dependent trap characterisation and modelling of silicon carbide MOS capacitor
Author
Li, J. (TU Delft Electronic Components, Technology and Materials)
Vollebregt, S. (TU Delft Electronic Components, Technology and Materials) 
Zhang, Y. (TU Delft Electronic Components, Technology and Materials)
Shekhar, A. (TU Delft DC systems, Energy conversion & Storage)
May, Alexander (Fraunhofer Institute for Integrated Systems and Devices Technology IISB)
van Driel, W.D. (TU Delft Electronic Components, Technology and Materials)
Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials)
Date
2024
Abstract
Due to the deficient passivation of the interface between silicon carbide and silicon dioxide, the defect-induced capture and release of trapped charges triggered by external Bias Temperature Stress (BTS) leads to parameter shifts and degraded device performance. This study models the trap-induced transient current in silicon carbide metal-oxide-semiconductor capacitors, providing insight into how capacitance and conductance change during C-V measurements under conditions of high temperature, varied frequency, and varied applied voltage.
Subject
Temperature measurement
Vibrations
Electron traps
Temperature dependence
Voltage measurement
Silicon carbide
Lattices
To reference this document use:
http://resolver.tudelft.nl/uuid:eca2f805-ac12-43f9-aebe-d8815b0f81bc
DOI
https://doi.org/10.1109/EuroSimE60745.2024.10491433
Publisher
IEEE
Embargo date
2024-10-09
ISBN
979-8-3503-9364-4
Source
Proceedings of the 2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Event
2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2024-04-07 → 2024-04-10, Catania, Italy
Series
2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2024
Bibliographical note
Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Part of collection
Institutional Repository
Document type
conference paper
Rights
© 2024 J. Li, S. Vollebregt, Y. Zhang, A. Shekhar, Alexander May, W.D. van Driel, Kouchi Zhang