MEMS Integration Techniques on Silicon-On-Insulator for Inertial Devices

Title

MEMS Integration Techniques on Silicon-On-Insulator for Inertial Devices

Author

Rajaraman, V.

Contributor

Dekker, R. (promotor)
Makinwa, K.A.A. (promotor)

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Date

2012-05-21

To reference this document use:

https://doi.org/10.4233/uuid:fa1d562f-48c7-4ac2-9764-4987f73b4b57

Publisher

Delft University of Technology

Embargo date

2015-12-31

ISBN

978-94-6191-316-6

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c)2012 Rajaraman, V.