Print Email Facebook Twitter Sensitive capacitive pressure sensors based on graphene membrane arrays Title Sensitive capacitive pressure sensors based on graphene membrane arrays Author Siskins, M. (TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft) Lee, M. (TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft) Wehenkel, D. (Applied Nanolayers) van Rijn, R. (TU Delft EKL-Users; Applied Nanolayers) de Jong, Tijmen W. (Kavli institute of nanoscience Delft; Student TU Delft) Renshof, Johannes R. (Kavli institute of nanoscience Delft; Student TU Delft) Hopman, Berend C. (Kavli institute of nanoscience Delft; Student TU Delft) Peters, Willemijn S.J.M. (Kavli institute of nanoscience Delft; Student TU Delft) Davidovikj, D. (TU Delft QN/van der Zant Lab; TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft) van der Zant, H.S.J. (TU Delft QN/van der Zant Lab; Kavli institute of nanoscience Delft) Steeneken, P.G. (TU Delft Dynamics of Micro and Nano Systems; TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft) Date 2020 Abstract The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to 47.8 aF Pa−1 mm−2, thereby outperforming the commercial sensors. Subject OA-Fund TU Delft To reference this document use: http://resolver.tudelft.nl/uuid:05e4f501-6109-443f-8743-bc3cb5801eeb DOI https://doi.org/10.1038/s41378-020-00212-3 ISSN 2096-1030 Source Microsystems & Nanoengineering, 6 (1) Part of collection Institutional Repository Document type journal article Rights © 2020 M. Siskins, M. Lee, D. Wehenkel, R. van Rijn, Tijmen W. de Jong, Johannes R. Renshof, Berend C. Hopman, Willemijn S.J.M. Peters, D. Davidovikj, H.S.J. van der Zant, P.G. Steeneken Files PDF s41378_020_00212_3.pdf 7.21 MB Close viewer /islandora/object/uuid:05e4f501-6109-443f-8743-bc3cb5801eeb/datastream/OBJ/view