Print Email Facebook Twitter Low power AlGaN/GaN MEMS pressure sensor for high vacuum application Title Low power AlGaN/GaN MEMS pressure sensor for high vacuum application Author Sun, J. (TU Delft Electronic Components, Technology and Materials; Shenzhen Institute of Wide-bandgap Semiconductors) Hu, D. (TU Delft Electronic Components, Technology and Materials) Liu, Zewen (Tsinghua University) Middelburg, L.M. (TU Delft Electronic Components, Technology and Materials) Vollebregt, S. (TU Delft Electronic Components, Technology and Materials) Sarro, Pasqualina M (TU Delft Electronic Components, Technology and Materials) Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials) Date 2020 Abstract A micro-scale pressure sensor based on suspended AlGaN/GaN heterostructure is reported with non-linear sensitivity. By sealing the cavity, vacuum sensing at various temperatures was demonstrated. To validate the proposed concept of the AlGaN/GaN vacuum sensor, a 700 µm diameter circular membrane was electrically characterized under applied static and dynamic pressures at various temperatures ranging from 25 °C to 100 °C. The current change of the AlGaN/GaN heterostructure increased as the vacuum and temperature increases due to the increase of 2DEG density by tensile strain. The dynamic current change from 96 kPa down to 10 Pa of AlGaN/GaN heterostructure pressure sensor was 18.75 % at 100 °C. The maximum sensitivity reached 22.8 %/kPa with a power consumption of 1.8 µW. These results suggest that suspended AlGaN/GaN heterostructures are promising for high vacuum and high-temperature sensing applications. Subject AlGaN/GaNMEMSPressure sensorVacuum To reference this document use: http://resolver.tudelft.nl/uuid:494e8519-2e5e-4951-bff7-12d8c4888441 DOI https://doi.org/10.1016/j.sna.2020.112217 Embargo date 2021-01-26 ISSN 0924-4247 Source Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, 314, 1-7 Bibliographical note Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type journal article Rights © 2020 J. Sun, D. Hu, Zewen Liu, L.M. Middelburg, S. Vollebregt, Pasqualina M Sarro, Kouchi Zhang Files PDF 1_s2.0_S0924424720303952_main.pdf 2.8 MB Close viewer /islandora/object/uuid:494e8519-2e5e-4951-bff7-12d8c4888441/datastream/OBJ/view