Study on Reverse Recovery of a P-pillar Tunable Super-Junction MOSFET*

Study on Reverse Recovery of a P-pillar Tunable Super-Junction MOSFET*

Liu, Ke (Southern University of Science and Technology)
Yuan, Wucheng (Southern University of Science and Technology)
Wang, S. (TU Delft Bio-Electronics)
Tan, C. (TU Delft Electronic Components, Technology and Materials)
Ye, H. (TU Delft Electronic Components, Technology and Materials; Southern University of Science and Technology)

2022

In this paper, a novel bubble-shift super junction (SJ) MOSFET structure is proposed, and its main static electrical parameters and reverse recovery characteristics are simulated by TCAD software tool. By designing the P-pillar ion implantation windows with a certain offset, the bubble-shift SJ-MOSFET contains a curved pillar region in the upper half of the P-pillar. In the reverse recovery test of the proposed bubble-shift SJ-MOSFET, the peak reverse recovery current (I rrm ) is reduced from 16.04 A to 15.21 A, and the current drop rate (di/dt) is reduced from 1587 A/μs to 815 A/μs. Correspondingly, the proposed device achieves a better reverse recovery characteristic while sacrificing a small fraction of the drain-source breakdown voltage (BV) and drain-source special on-resistance (R on,sp ). Compared with the BV of 700 V and the R on,sp of 9 mΩ·cm 2 of the benchmark SJ-MOSFET. The proposed device has a BV of 650 V and a R on,sp of 12.4 mΩ·cm 2 . Mechanistically, the non-uniform depletion of the curved P-pillar reduces the carrier extraction rate, thereby prolonging the reverse current drop time (t f ) and increasing the softness factor (S) of the bubble-shift SJ-MOSFET.

super junction
reverse recovery
P-pillar
bubbleshift
TCAD

http://resolver.tudelft.nl/uuid:5b98065c-8069-4933-8f9e-147edb367f80

https://doi.org/10.1109/ICEPT56209.2022.9873376

IEEE

2023-07-01

978-1-6654-9906-4

Proceedings of the 2022 23rd International Conference on Electronic Packaging Technology (ICEPT)

2022 23rd International Conference on Electronic Packaging Technology (ICEPT), 2022-08-10 → 2022-08-13, Dalian, China

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Institutional Repository

conference paper

© 2022 Ke Liu, Wucheng Yuan, S. Wang, C. Tan, H. Ye