Micro-electromechanical system

Title

Micro-electromechanical system

 Author

Tolou, N.
Herder, J.L.

Faculty

Mechanical, Maritime and Materials Engineering

 Department

Biomechanical Engineering

 Date

2012-02-02

 Abstract

Micro-electromechanical system (MEMS) comprising a substrate or substrate parts, and a compliant first segment or segments within the substrate or substrate parts with a predefined positive stiffness, wherein the first segment or segments is or are statically balanced. This is embodied by applying a second segment or segments within the substrate or substrate parts that provide a balancing force to the first segment or segments so as to counteract at least in a predefined working range of the first segment or segments the said predefined positive stiffness.

 To reference this document use:

http://resolver.tudelft.nl/uuid:7be14e91-5e19-4d82-8da4-28111fd447de

 Publisher

European Patent Office

 Source

http://worldwide.espacenet.com/publicationDetails/biblio?DB=EPODOC&II=16&ND=3&adjacent=true&locale=en_EP&FT=D&date=20120202&CC=WO&NR=2012015301A2&KC=A2

 Source

WO 2012015301 (A2)

 Part of collection

Institutional Repository

 Document type

patent

 Rights

(c) 2012 The Author(s)
Files
PDF WO2012015301A21.pdf 1016.82 KB
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