Highly sensitive silicon Mach-Zehnder interferometer-based ultrasound sensor

Highly sensitive silicon Mach-Zehnder interferometer-based ultrasound sensor

Ouyang, B. (TU Delft ImPhys/Computational Imaging)
Li, Yanlu (Universiteit Gent)
Kruidhof, Marten (Student TU Delft)
Horsten, R.C. (TU Delft ImPhys/Optics)
Baets, Roel (Universiteit Gent)
van Dongen, K.W.A. (TU Delft ImPhys/Medical Imaging)
Caro-Schuurman, J. (TU Delft ImPhys/Computational Imaging)

Garcia-Blanco, Sonia M. (editor)
Cheben, Pavel (editor)

2020

We report a highly sensitive ultrasound sensor based on an integrated photonics silicon Mach-Zehnder interferometer (MZI). One arm of the MZI is located on a thin membrane, acting as the sensing part of the device. Ultrasound waves excite the membrane's vibrational mode, thus inducing modulation of the MZI transmission. The measured sensor transfer function is centered at 0.47 MHz and has a -6 dB bandwidth of 21.2%. For 1.0 mW optical input power, we obtain a high sensitivity of 0.62 mV/Pa, a low detection limit of 0.38 mPa/Hz^1/2 at the resonance frequency and a large dynamic range of 59 dB. In preliminary ultrasound imaging experiments using this sensor, an image of a wire phantom is obtained. The properties of this sensor and the generated image show that this sensor is very promising for ultrasound imaging applications.

Imaging
Integrated photonics sensors
MEMS
MZI
Ultrasound

http://resolver.tudelft.nl/uuid:9bf47e37-0ec8-4d77-8f7a-2e804a8e8b53

https://doi.org/10.1117/12.2539573

SPIE

978-1-5106-3329-2

Proceedings of SPIE: Integrated Optics : Devices, Materials, and Technologies XXIV, 11283

Integrated Optics: Devices, Materials, and Technologies XXIV 2020, 2020-02-03 → 2020-02-06, San Francisco, United States

Proceedings of SPIE

Institutional Repository

conference paper

© 2020 B. Ouyang, Yanlu Li, Marten Kruidhof, R.C. Horsten, Roel Baets, K.W.A. van Dongen, J. Caro-Schuurman