Molecular Dynamics Simulation on Mechanical behavior of Si Nano Cantilever under Ar Bombarding

In nano world, it is cheap and repeatable to make 2-dimensional structures, such as nanoholes and thin nanofilms. However, it is expensive to build 3-dimensional structure in a repeatable manner. Ion bombard- ment is a technique which is widely applied in engineering areas, such as thin film deposition, etching, and analysis. In this thesis work...