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Krijnen, Bram (author), Swinkels, Koen (author), Brouwer, Dannis M. (author), Abelmann, Leon (author), Herder, J.L. (author)A 3-DoF micro-electromechanical (MEMS) stage has been designed with an innovative integrated feedback system based on thermal sensors. The stage is integrated in the device layer of a silicon-oninsulator-wafer, which means that no assembly is required and the stage can be fabricated using only a single mask. The range of motion is over 160 μm in...journal article 2015