Li, Z. (author), Xu, M. (author), Norte, R.A. (author), Aragon, A.M. (author), van Keulen, A. (author), Alijani, F. (author), Steeneken, P.G. (author) In recent years, the Q-factor of Si 3 N 4 nanomechanical resonators has significantly been increased by soft-clamping techniques using large and complex support structures. To date, however, obtaining similar performance with smaller supports has remained a challenge. Here, we make use of torsion beam supports to tune the Q-factor of Si 3 N 4...
journal article 2023