Tuning the Q -factor of nanomechanical string resonators by torsion support design

In recent years, the Q-factor of Si 3 N 4 nanomechanical resonators has significantly been increased by soft-clamping techniques using large and complex support structures. To date, however, obtaining similar performance with smaller supports has remained a challenge. Here, we make use of torsion beam supports to tune the Q-factor of Si 3 N 4...

Effect of pressure on nonlinear dynamics and instability of electrically actuated circular micro-plates

Characterization of nonlinear behavior of micro-mechanical components in MEMS applications plays an important role in their design process. In this paper, nonlinear dynamics, stability and pull-in mechanisms of an electrically actuated circular micro-plate subjected to a differential pressure are studied. For this purpose, a reduced-order...

Chaos: The speed limiting phenomenon in dynamic atomic force microscopy

This paper investigates the closed-loop dynamics of the Tapping Mode Atomic Force Microscopy using a new mathematical model based on the averaging method in Cartesian coordinates. Experimental and numerical observations show that the emergence of chaos in conventional tapping mode AFM strictly limits the imaging speed. We show that, if the...

Experimental characterization of graphene by electrostatic resonance frequency tuning

In the last decade, graphene membranes have drawn tremendous attention due to their potential application in Nano-Electro-Mechanical Systems. In this paper, we show that the frequency response curves of graphene resonators are powerful tools for their dynamic characterization and for extracting their equivalent Young's modulus. For this purpose,...