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Serra, E. (author), Bawaj, M. (author), Borrielli, A. (author), Di Giuseppe, G. (author), Forte, S. (author), Kralj, N. (author), Malossi, N. (author), Marconi, L. (author), Marin, F. (author), Marino, F. (author), Morana, B. (author), Natali, R. (author), Pandraud, G. (author), Pontin, A. (author), Prodi, G.A. (author), Rossi, M. (author), Sarro, Pasqualina M (author), Vitali, D. (author), Bonaldi, M. (author)In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN<sub><i>x</i></sub> membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN<sub><i>x</i></sub> membranes were fabricated and used as optomechanical resonators in a...journal article 2016
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Pontin, A. (author), Biancofiore, C. (author), Serra, E. (author), Borrielli, A. (author), Cataliotti, F.S. (author), Marino, F. (author), Prodi, G.A. (author), Bonaldi, M. (author), Marin, F. (author), Vitali, D. (author)Ponderomotive squeezing of the output light of an optical cavity has been recently observed in the megahertz range in two different cavity optomechanical devices. Quadrature squeezing becomes particularly useful at lower spectral frequencies, for example, in gravitational wave interferometers, despite being more sensitive to excess phase and...journal article 2014