Measuring residual stresses in individual on-chip interconnects using synchrotron nanodiffraction

As the dimensions of interconnects in integrated circuits continue to shrink, an urgent need arises to understand the physical mechanism associated with electromigration. Using x-ray nanodiffraction, we analyzed the stresses in Blech-structured pure Cu lines subjected to different electromigration conditions. The results suggest that the...

Multi-level Indoor Path Planning Method

Indoor navigation is increasingly widespread in complex indoor environments, and indoor path planning is the most important part of indoor navigation. Path planning generally refers to finding the most suitable path connecting two locations, while avoiding collision with obstacles. However, it is a fundamental problem, especially for 3D complex...

Dynamic plasmonic beam shaping by vector beams with arbitrary locally linear polarization states

Vector beams, which have space-variant state of polarization (SOP) comparing with scalar beams with spatially homogeneous SOP, are used to manipulate surface plasmon polarizations (SPPs). We find that the excitation, orientation, and distribution of the focused SPPs excited in a high numerical aperture microscopic configuration highly depend on...