Electron optics of microlenses with inclined beams

For multielectron beam systems with a single electron source, the outside beams need to be collimated before entering the individual microcolumns. As an alternative of the traditional multibeam source design where the broad beam from the source is collimated by a single lens, the broad beam can be first split in subbeams that are focused by a...

Multibeam Electron Source using MEMS Electron Optical Components