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Pezone, R. (author), Anzinger, Sebastian (author), Baglioni, G. (author), Wasisto, Hutomo Suryo (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author), Vollebregt, S. (author)Since the performance of micro-electro-mechanical system (MEMS)-based microphones is approaching fundamental physical, design, and material limits, it has become challenging to improve them. Several works have demonstrated graphene’s suitability as a microphone diaphragm. The potential for achieving smaller, more sensitive, and scalable on...journal article 2024
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Pezone, R. (author), Baglioni, G. (author), van Ruiten, C. (author), Anzinger, S. (author), Wasisto, H. S. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author), Vollebregt, S. (author)As a consequence of their high strength, small thickness, and high flexibility, ultrathin graphene membranes show great potential for pressure and sound sensing applications. This study investigates the performance of multi-layer graphene membranes for microphone applications in the presence of air-loading. Since microphones need a flatband...journal article 2024
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Pezone, R. (author), Anzinger, Sebastian (author), Baglioni, G. (author), Wasisto, Hutomo Suryo (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author), Vollebregt, S. (author)Correction to: Microsystems & Nanoengineering https://doi.org/10.1038/s41378-024-00656-x published online 21 February 2024 After publication of this article<sup>1</sup>, it was brought to our attention that two pressure values were not correctly copied from the submitted original work to the published version. Correction 1 (from PDF, Page...journal article 2024