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- Sluijter, M. (author), De Boer, D.K.G. (author), Urbach, H.P. (author), Strömer, J. (author), Cennini, G. (author) conference paper 2009
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Krieg, M.L. (author), Braat, J.J.M. (author)This paper will illustrate several approaches to retrieving the shape of aspherical reflective surfaces as used in EUV Lithography, from measurements from a previously reported angstrom-accuracy interferometer. First, the working principles of the interferometer will be reviewed, and typical measurement data expected from the instrument will be...conference paper 2004