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Polarization tomography of metallic nanohole arrays

Altewischer, E. (author), Genet, C. (author), Van Exter, M.P. (author), Woerdman, J.P. (author), Alkemade, P.F.A. (author), Van Zuuk, A. (author), Van der Drift, E.W.J.M. (author)

We report polarization tomography experiments on metallic nanohole arrays with square and hexagonal symmetry. As a main result we find that a fully polarized input beam is partly depolarized after transmission through a nanohole array. This loss of polarization coherence is found to be anisotropic; i.e., it depends on the polarization state of...

journal article 2005

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Propulsion of ripples on glass by ion bombardment

Alkemade, P.F.A. (author)

journal article 2006

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Measuring the wavelength-dependent divergence of transmission through sub-wavelength hole-arrays by spectral imaging

Docter, M.W. (author), Young, I.T. (author), Piciu, O.M. (author), Bossche, A. (author), Alkemade, P.F.A. (author), Van den Berg, P.M. (author), Garini, Y. (author)

We present a study on the far-field patterns of light transmitted through sub-wavelength metallic hole-arrays. Spectral imaging measurements are used here on hole arrays for the first time. It provides both spatial and spectral information of the transmission in far-field. The visibility of the images, measured in two illumination modes: Köhler...

journal article 2006

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Bouncing surface plasmons

Kuzmin, N.V. (author), Alkemade, P.F.A. (author), 't Hooft, G.W. (author), Elie, E.R. (author)

Employing an interferometric cavity ring-down technique we study the launching, propagation and reflection of surface plasmons on a smooth gold-air interface that is intersected by two parallel, subwavelength wide slits. Inside the low-finesse optical cavity defined by these slits the surface plasmon is observed to make multiple bounces. Our...

journal article 2007

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Structured illumination microscopy using extraordinary transmission through sub-wavelength hole-arrays

Docter, M.W. (author), Van den Berg, P.M. (author), Alkemade, P.F.A. (author), Kutchoukov, V.G. (author), Piciu, O.M. (author), Bossche, A. (author), Young, I.T. (author), Garini, Y. (author)

journal article 2007

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Coherent control of surface plasmon polariton mediated optical transmission

Guyader, L.Le. (author), Kirilyuk, A. (author), Rasing, Th. (author), Wurtz, G.A. (author), Zayats, A.V. (author), Alkemade, P.F.A. (author), Smolyaninov, I.I. (author)

journal article 2008

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Fast single-step fabrication of nanopores

Chen, P. (author), Wu, M.Y. (author), Salemink, H.W.M. (author), Alkemade, P.F.A. (author)

We report a new method for the fabrication of sub-10 nm nanopores in a fast single process step. The pore formation is accomplished by exploiting the competition between sputtering and deposition in ion-beam-induced deposition (IBID) on a thin membrane. The pore diameter can be controlled by adjusting the ion beam and gas exposure conditions....

journal article 2008

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Proximity effect in ion-beam-induced deposition of nanopillars

Chen, P. (author), Salemink, H.W.M. (author), Alkemade, P.F.A. (author)

Ion-beam-induced deposition (IBID) is a powerful technique for prototyping three-dimensional nanostructures. To study its capability for this purpose, the authors investigate the proximity effect in IBID of nanopillars. In particular, the changes in shape and dimension of pillars are studied when a second pillar is grown near an existing pillar....

journal article 2009

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Sub-10-nm nanolithography with a scanning helium beam

Sidorkin, V. (author), Van Veldhoven, E. (author), Van der Drift, E.W.J.M. (author), Alkemade, P.F.A. (author), Salemink, H. (author), Maas, D. (author)

Scanning helium ion beam lithography is presented as a promising pattern definition technique for dense sub-10-nm structures. The powerful performance in terms of high resolution, high sensitivity, and a low proximity effect is demonstrated in a hydrogen silsesquioxane resist.

journal article 2009

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Method for improving the aspect ratio of ultrahigh-resolution structures in negative electron-beam resist

Sidorkin, V.A. (author), Alkemade, P.F.A. (author), Salemink, H.W.M. (author), Schmits, R. (author), Van der Drift, E. (author)

A method for improving the aspect ratio of ultrahigh-resolution structures in negative electron-beam resist is provided for enhanced pattern-transfer capabilities. The essence of the proposed method is to form a protective “cap” on top of the resist structure by means of electron-beam-induced deposition (EBID) in a self-aligned approach. This is...

journal article 2009

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Roles of secondary electrons and sputtered atoms in ion-beam-induced deposition

Chen, P. (author), Salemink, H.W.M. (author), Alkemade, P.F.A. (author)

The authors report the results of investigating two models for ion-beam-induced deposition (IBID). These models describe IBID in terms of the impact of secondary electrons and of sputtered atoms, respectively. The yields of deposition, sputtering, and secondary electron emission, as well as the energy spectra of the secondary electrons were...

journal article 2009

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Beam induced deposition of platinum using a helium ion microscope

Sanford, C.A. (author), Stern, L. (author), Barriss, L. (author), Farkas, L. (author), DiManna, M. (author), Mello, R. (author), Maas, D.J. (author), Alkemade, P.F.A. (author)

Helium ion microscopy is now a demonstrated practical technology that possesses the resolution and beam currents necessary to perform nanofabrication tasks, such as circuit edit applications. Due to helium’s electrical properties and sample interaction characteristics relative to gallium, it is likely that the properties and deposition...

journal article 2009

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Nanofabrication with a High Resolution Helium Ion Beam

Van Veldhoven, E. (author), Sidorkin, V. (author), Chen, P. (author), Alkemade, P. (author), Van der Drift, E. (author), Salemink, H. (author), Zandbergen, H. (author), Maas, D. (author)

journal article 2010

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Nanopillar growth by focused helium ion-beam-induced deposition

Chen, P. (author), Van Veldhoven, E. (author), Sanford, C.A. (author), Salemink, H.W.M. (author), Maas, D.J. (author), Smith, D.A. (author), Rack, P.D. (author), Alkemade, P.F.A. (author)

A 25 keV focused helium ion beam has been used to grow PtC nanopillars on a silicon substrate by beam-induced decomposition of a (CH3)3Pt(CPCH3) precursor gas. The ion beam diameter was about 1 nm. The observed relatively high growth rates suggest that electronic excitation is the dominant mechanism in helium ion-beam-induced deposition. Pillars...

journal article 2010

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Model for nanopillar growth by focused helium ion-beam-induced deposition

Alkemade, P.F.A. (author), Chen, P. (author), Van Veldhoven, E. (author), Maas, D. (author)

An analytical model for the growth of nanopillars by helium ion-beam-induced deposition is presented and compared to experimental data. This model describes the competition between pillar growth in vertical and lateral directions. It assumes that vertical growth is induced by incident primary ions and type-1 secondary electrons, whereas lateral...

journal article 2010

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Pulsed helium ion beam induced deposition: A means to high growth rates

Alkemade, P.F.A. (author), Miro, H. (author), Van Veldhoven, E. (author), Maas, D.J. (author), Smith, D.A. (author), Rack, P.D. (author)

The sub-nanometer beam of a helium ion microscope was used to study and optimize helium-ion beam induced deposition of PtC nanopillars with the (CH3)3Pt(CPCH3) precursor. The beam current, beam dwell time, precursor refresh time, and beam focus have been independently varied. Continuous beam exposure resulted in narrow but short pillars, while...

journal article 2011

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A subwavelength slit as a quarter-wave retarder

Chimento, P.F. (author), Kuzmin, N.V. (author), Bosman, J. (author), Alkemade, P.F.A. (author), 'T Hooft, G.W. (author), Eliel, E.R. (author)

We have experimentally studied the polarization-dependent transmission properties of a nanoslit in a gold film as a function of its width. The slit exhibits strong birefringence and dichroism. We find, surprisingly, that the transmission of the polarization parallel to the slit only disappears when the slit is much narrower than half a...

journal article 2011

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Optical angular momentum conversion in a nanoslit

Chimento, P.F. (author), Alkemade, P.F.A. (author), 'T Hooft, G.W. (author), Eliel, E.R. (author)

We demonstrate partial conversion of circularly polarized light into orbital angular momentum-carrying vortex light with opposite-handed circular polarization. This conversion is accomplished in a novel manner using the birefringent properties of a circular subwavelength slit in a thin metal film. Our technique can be applied over a very wide...

journal article 2012

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Optical angular momentum conversion in a nanoslit: Reply

Chimento, P.F. (author), Alkemade, P.F.A. (author), 'T Hooft, G.W. (author), Eliel, E.R. (author)

We respond to a Comment on our Letter [Opt. Lett. 37, 4946 (2012)], in which we reported on the spin-to-orbital optical angular momentum conversion of a circular nanoslit in a thin metal layer. We claimed, in an unfortunately worded sentence, that the conversion efficiency was independent of the slit’s dichroism, which the Comment pointed out...

journal article 2013

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Probing the magnetic moment of FePt micromagnets prepared by focused ion beam milling

Overweg, H.C. (author), Den Haan, A.M.J. (author), Eerkens, H.J. (author), Alkemade, P.F.A. (author), La Rooij, A.L. (author), Spreeuw, R.J.C. (author), Bossoni, L. (author), Oosterkamp, T.H. (author)

We investigate the degradation of the magnetic moment of a 300?nm thick FePt film induced by Focused Ion Beam (FIB) milling. A 1??m?×?8??m rod is milled out of a film by a FIB process and is attached to a cantilever by electron beam induced deposition. Its magnetic moment is determined by frequency-shift cantilever magnetometry. We find that the...

journal article 2015