Wide-angle spectral imaging using a Fabry-Perot interferometer

We show that wide-angle spectral imaging can be achieved with compact and cost-effective devices using Fabry-Pérot interferometers. Designs with a full field of view of 90°, in which the Fabry-Pérot interferometer is mounted either in front of an imaging lens system or behind a telecentric lens system, are presented and analysed. We show the...

Determination of wavefront structure for a HartmannWavefront Sensor using a phase-retrieval method

We apply a phase retrieval algorithm to the intensity pattern of a Hartmann wavefront sensor to measure with enhanced accuracy the phase structure of a Hartmann hole array. It is shown that the rms wavefront error achieved by phase reconstruction is one order of magnitude smaller than the one obtained from a typical centroid algorithm....

Finding new local minima in lens design landscapes by constructing saddle points

Chaotic behavior in an algorithm to escape from poor local minima in lens design

In lens design, damped least-squares methods are typically used to find the nearest local minimum to a starting configuration in the merit function landscape. In this paper, we explore the use of such a method for a purpose that goes beyond local optimization. The merit function barrier, which separates an unsatisfactory solution from a...

Instabilities and fractal basins of attraction in optical system optimization

Many optical design programs use various forms of the damped least-squares method for local optimization. In this paper, we show that damped least-squares algorithms, with maximized computational speed, can create sensitivity with respect to changes in initial conditions. In such cases, starting points, which are very close to each other, lead...

High-order optical aberration coefficients: Extension to finite objects and to telecentricity in object space

We extend the method for the automatic computation of high-order optical aberration coefficients to include (1) a finite object distance and (2) an infinite entrance pupil position (telecentricity in object space). We present coefficients of the power series expansion of the transverse aberration vector with respect to the normalized aperture...

Saddle-point construction in the design of lithographic objectives, part 1: Method

Saddle-point construction in the design of lithographic objectives, part 2: Application

Optimization of extreme ultraviolet mirror systems comprising high-order aspheric surfaces

Network search method in the design of extreme ultraviolet lithographic objectives

The merit function space of mirror system for extreme ultraviolet (EUV) lithography is studied. Local minima situated in the multidimensional optical merit function space are connected via links that contain saddle points and form a network. We present networks for EUV lithographic objective designs and discuss how these networks change when...

Looking for order in the optical design landscape

Poster presentation Optics Research Group TU Delft in cooperation with STW The presence of multiple local minima in the merit function landscape is one of the main difficulties in optical system design, especially for systems with many variables. By considering saddle points, we find a certain degree of order in the design landscape that...

Networks of local minima for EUV mirror systems

Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy and TNO

Generation of optical systems for lithography via saddle points

Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy and TNO

Networks of local minima for extreme ultraviolet lithographic objectives

Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy and TNO

Networks of local minima for EUV mirror systems

Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy

Avoiding unstable regions in the design space of EUV mirror systems with high-order aspheric surfaces

Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy