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Liu, Y. (author), Salemink, H.W.M. (author)
We report the results of a study of an optical sensor based on a channel-drop technique with two cascaded cavities in photonic-crystal slabs. Quality factors and intensities of the resonant modes of the sensor were analyzed with three-dimensional simulations. With the introduction of a reflector in the bus-channel and by control of the coupling...
journal article 2015
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Liu, Y. (author), Salemink, H.W.M. (author)
A highly sensitive sensor design based on two-dimensional photonic crystal cavity is demonstrated. The geometric structure of the cavity is modified to gain a high quality factor, which enables a sensitive refractive index sensing. A group of slots with optimized parameters is created in the cavity. The existence of the slots enhances the light...
journal article 2015
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Liu, Y. (author), Salemink, H.W.M. (author)
In this paper we demonstrate a sensor based on a two-dimensional photonic crystal cavity structure. Design, theoretical simulations, fabrication and experiments are shown to illustrate the working principle of this device. Sensitivity of our sensor is determined by observing the shift of resonant wavelength of the photonic crystal cavity as a...
journal article 2012
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Chen, P. (author), Van Veldhoven, E. (author), Sanford, C.A. (author), Salemink, H.W.M. (author), Maas, D.J. (author), Smith, D.A. (author), Rack, P.D. (author), Alkemade, P.F.A. (author)
A 25 keV focused helium ion beam has been used to grow PtC nanopillars on a silicon substrate by beam-induced decomposition of a (CH3)3Pt(CPCH3) precursor gas. The ion beam diameter was about 1 nm. The observed relatively high growth rates suggest that electronic excitation is the dominant mechanism in helium ion-beam-induced deposition. Pillars...
journal article 2010
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Van Veldhoven, E. (author), Sidorkin, V. (author), Chen, P. (author), Alkemade, P. (author), Van der Drift, E. (author), Salemink, H. (author), Zandbergen, H. (author), Maas, D. (author)
journal article 2010
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Nguyen, H.M. (author), Dundar, M.A. (author), Van der Heijden, R.W. (author), Van der Drift, E.W.J.M. (author), Salemink, H.W.M. (author), Rogge, S. (author), Caro, J. (author)
We demonstrate a compact silicon photonic crystal Mach-Zehnder interferometer operating in the self-collimation regime. By tailoring the photonic band structure such as to produce self-collimated beams, it is possible to design beam splitters and mirrors and combine these to a 20 × 20 ?m2 format. With transmission spectroscopy we find a...
journal article 2010
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Chen, P. (author), Salemink, H.W.M. (author), Alkemade, P.F.A. (author)
The authors report the results of investigating two models for ion-beam-induced deposition (IBID). These models describe IBID in terms of the impact of secondary electrons and of sputtered atoms, respectively. The yields of deposition, sputtering, and secondary electron emission, as well as the energy spectra of the secondary electrons were...
journal article 2009
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Sidorkin, V.A. (author), Alkemade, P.F.A. (author), Salemink, H.W.M. (author), Schmits, R. (author), Van der Drift, E. (author)
A method for improving the aspect ratio of ultrahigh-resolution structures in negative electron-beam resist is provided for enhanced pattern-transfer capabilities. The essence of the proposed method is to form a protective “cap” on top of the resist structure by means of electron-beam-induced deposition (EBID) in a self-aligned approach. This is...
journal article 2009
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Dündar, M.A. (author), Kicken, H.H.J.E. (author), Silov, A.Y. (author), Nötzel, R. (author), Karouta, F. (author), Salemink, H.W.M. (author), Van der Heijden, R.W. (author)
Mode-dependent shifts of resonant frequencies of cavities in liquid crystal (LC) infiltrated planar photonic crystals (PhC) are experimentally observed when the temperature is varied across the LC ordering transition. The shifts can be in opposite directions, even for two very similar nearly degenerate modes. The behavior is attributed to the...
journal article 2009
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Kicken, H.H.J.E. (author), Barbu, I. (author), Van der Heijden, R.W. (author), Karouta, F. (author), Nötzel, R. (author), Van der Drift, E. (author), Salemink, H.W.M. (author)
The photonic properties of two classes of wavelength-sized cavities are reported for deeply etched InP/InGaAsP/InP planar photonic crystals. The high aspect, deeply etched structures are studied as potential building blocks for nonmembrane type photonic devices in standard InP photonic integrated circuits. The first class consists of cavities of...
journal article 2009
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Sidorkin, V. (author), Van Veldhoven, E. (author), Van der Drift, E.W.J.M. (author), Alkemade, P.F.A. (author), Salemink, H. (author), Maas, D. (author)
Scanning helium ion beam lithography is presented as a promising pattern definition technique for dense sub-10-nm structures. The powerful performance in terms of high resolution, high sensitivity, and a low proximity effect is demonstrated in a hydrogen silsesquioxane resist.
journal article 2009
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Kicken, H.H.J.E. (author), Barbu, I. (author), Van der Heijden, R.W. (author), Karouta, F. (author), Nötzel, R. (author), Van der Drift, E.W.J.M. (author), Salemink, H.W.M. (author)
Wavelength-sized point defect cavities coupled to access waveguides are reported for deeply etched InP/InGaAsP/InP two-dimensional photonic crystals. The observed quality factor of 60 is comparable to those found for one-row defect Fabry–Perot cavities and for simple point defect cavities in membranes. The quality factor was changed by varying...
journal article 2009
document
Chen, P. (author), Salemink, H.W.M. (author), Alkemade, P.F.A. (author)
Ion-beam-induced deposition (IBID) is a powerful technique for prototyping three-dimensional nanostructures. To study its capability for this purpose, the authors investigate the proximity effect in IBID of nanopillars. In particular, the changes in shape and dimension of pillars are studied when a second pillar is grown near an existing pillar....
journal article 2009
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Chen, P. (author), Wu, M.Y. (author), Salemink, H.W.M. (author), Alkemade, P.F.A. (author)
We report a new method for the fabrication of sub-10 nm nanopores in a fast single process step. The pore formation is accomplished by exploiting the competition between sputtering and deposition in ion-beam-induced deposition (IBID) on a thin membrane. The pore diameter can be controlled by adjusting the ion beam and gas exposure conditions....
journal article 2008
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Sidorkin, V. (author), Van der Drift, E.W.J.M. (author), Salemink, H. (author)
Performance of hydrogen silsesquioxane (HSQ) resist material with respect to the temperature during electron beam exposure was investigated. Electron beam exposure at elevated temperatures up to 90?°C shows sensitivity rise and slight contrast (?) degradation compared to lower temperature cases. Ultrahigh resolution structures formed at elevated...
journal article 2008
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Christova, C.G. (author), Stouwdam, J.W. (author), Eijkemans, T.J. (author), Silov, A.Y. (author), Van der Heijden, R.W. (author), Kemerink, M. (author), Janssen, R.A.J. (author), Salemink, H.W.M. (author)
Remarkable photoluminescence enhancement (PLE) in submonolayer films of PbSe nanocrystals (NCs) upon continuous illumination was observed. The intensity increase from films on InP substrates was highest in vacuum, while for films on Si/SiO2 substrates the PLE was stronger in air. The magnitude of the PLE was found to depend on the excitation...
journal article 2008
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Carlström, C.F. (author), Van der Heijden, R. (author), Andriesse, M.S.P. (author), Karouta, F. (author), Van der Heijden, R.W. (author), Van der Drift, E.W.J.M. (author), Salemink, H.W.M. (author)
An extensive investigation has been performed on inductively coupled plasma etching of InP. An important motivation for this work is the fabrication of high-aspect-ratio holes for photonic crystals. The essential chemistry is based on Cl2 with the addition of N2 or O2 for sidewall passivation. The influence of different process parameters such...
journal article 2008
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Caro, J. (author), Roeling, E.M. (author), Rong, B. (author), Nguyen, H.M. (author), Van der Drift, E.W.J.M. (author), Rogge, S. (author), Karouta, F. (author), Van der Heijden, R.W. (author), Salemink, H.W.M. (author)
A high-contrast-ratio (30 dB) photonic band gap in the near-infrared transmission of hole-type GaN two-dimensional photonic crystals (PhCs) is reported. These crystals are deeply etched in a 650 nm thick GaN layer grown on sapphire. A comparison of the measured spectrum with finite difference time domain simulations gives quantitative agreement...
journal article 2008
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Liu, M. (author), Rong, B. (author), Salemink, H.W.M. (author)
journal article 2007
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Van der Heijden, R. (author), Carlström, C.F. (author), Snijders, J.A.P. (author), Van der Heijden, R.W. (author), Karouta, F. (author), Nötzel, R. (author), Salemink, H.W.M. (author), Kjellander, B.K.C. (author), Bastiaansen, C.W.M. (author), Broer, D.J. (author), Van der Drift, E. (author)
Polymer filling of the air holes of indium-phosphide-based two-dimensional photonic crystals is reported. After infiltration of the holes with a liquid monomer and solidification of the infill in situ by thermal polymerization, complete filling is proven using scanning electron microscopy. Optical transmission measurements of a filled photonic...
journal article 2006
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