Electron-beam-induced deposition of 3-nm-half-pitch patterns on bulk Si

This paper demonstrates electron-beam-induced deposition of few-nm-width dense features on bulk samples by using a scanning electron-beam lithography system. To optimize the resultant features, three steps were taken: (1) features were exposed in a repetitive sequence, so as to build up the deposited features gradually across the entire pattern,...

Photon noise limited radiation detection with lens-antenna coupled microwave kinetic inductance detectors

Microwave kinetic inductance detectors (MKIDs) have shown great potential for sub-mm instrumentation because of the high scalability of the technology. Here, we demonstrate for the first time in the sub-mm band (0.1–2 mm) a photon noise limited performance of a small antenna coupled MKID detector array and we describe the relation between photon...

Noise temperature and beam pattern of an NbN hot electron bolometer mixer at 5.25 THz

We report the measured sensitivities of a superconducting NbN hot electron bolometer (HEB) heterodyne receiver at 5.25 THz. Terahertz (THz) radiation is quasioptically coupled to a HEB mixer with a lens and a spiral antenna. Using a measurement setup with black body calibration sources and a beam splitter in vacuo, and an antireflection coated...

Reduced frequency noise in superconducting resonators

We report a reduction in the frequency noise in coplanar waveguide superconducting resonators. The reduction of 7 dB is achieved by removing the exposed dielectric substrate surface from the region with high electric fields and by using NbTiN. In a model-analysis the surface of NbTiN is found to be a negligible source of noise, experimentally...

Noise in NbTiN, Al, and Ta Superconducting Resonators on Silicon and Sapphire Substrates

We present measurements of the frequency noise and resonance frequency temperature dependence in planar superconducting resonators on both silicon and sapphire substrates. We show, by covering the resonators with sputtered SiOx layers of different thicknesses, that the temperature dependence of the resonance frequency scales linearly with...

Elementary charge-transfer processes in mesoscopic conductors

We determine charge-transfer statistics in a quantum conductor driven by a time-dependent voltage and identify the elementary transport processes. At zero temperature unidirectional and bidirectional single-charge transfers occur. The unidirectional processes involve electrons injected from the source terminal due to excess dc bias voltage. The...

Current-induced noise and damping in nonuniform ferromagnets

In the presence of spatial variation in the magnetization direction, electric current noise causes a fluctuating spin-transfer torque that increases the fluctuations of the ferromagnetic order parameter. By the fluctuationdissipation theorem, the fluctuations at thermal equilibrium are related to the viscous magnetization damping, which in...

Contribution of dielectrics to frequency and noise of NbTiN superconducting resonators

We study NbTiN resonators by measurements of the temperature dependent resonance frequency and frequency noise. Additionally, resonators are studied covered with SiOx dielectric layers of various thicknesses. The resonance frequency develops a nonmonotonic temperature dependence with increasing SiOx layer thickness. The increase in the noise is...

Influence of the direct response on the heterodyne sensitivity of hot electron bolometer mixers

We present a detailed experimental study of the direct detection effect in a small volume (0.15??m×1??m×3.5?nm) quasioptical NbN phonon cooled hot electron bolometer mixer at 673?GHz. We find that the small signal noise temperature, relevant for an astronomical observation, is 20% lower than the noise temperature obtained using 300 and 77?K...