Enabling aberration retrieval of microlenses with the Extended Nijboer-Zernike (ENZ) diffraction theory

We propose a measurement approach that allows the determination of aberrations of a microlens by analyzing the through-focus intensity image it produces when the object is a point source. To simulate image formation by a microlens we apply the extended version of the Nijboer-Zernike diffraction theory (ENZ) that uses the Debye diffraction...