- document
-
Silvis-Cividjian, N. (author), Hagen, C.W. (author), Kruit, P. (author)Electron-beam-induced deposition (EBID) is a versatile micro- and nanofabrication technique based on electron-induced dissociation of metal-carrying gas molecules adsorbed on a target. EBID has the advantage of direct deposition of three-dimensional structures on almost any target geometry. This technique has occasionally been used in focused...journal article 2005