The network structure of the merit function space of EUV mirror systems

The merit function space of mirror systems for EUV lithography is studied. Local minima situated in a multidimensional merit function space are connected via links that contain saddle points and form a network. In this work we present the first networks for EUV lithographic objectives and discuss how these networks change when control parameters...

Topography of the merit function landscape in optical system design

We have shown recently that, when certain quite general conditions are satisfied, the set of local minima in the optical merit function space forms a network where they are all connected through optimization paths generated from saddle points having a Morse index of 1. A new global optimization method, that makes use of this linking network to...