Electrochemical study of potential materials for cochlear implant electrode array (abstract)

Cochlear implants (CIs) are commonly accepted therapeutic devices for clinical use and have restored hearing to more than 230,000 profoundly deaf people. CI devices consists of an external part comprising a speech processor (DSP) a microphone which together receive and convert the sound into a digital data stream using a speech processing...

Surface functionalisation of TiO2 evanescent waveguide sensor for E.coli monitoring

Robust Wafer-Level Thin-Film Encapsulation (Packaging) of Microstructures (MEMS) using Low Stress PECVD Silicon Carbide

This paper presents a new low-cost, CMOS-compatible and robust wafer-level encapsulation technique developed using a stress-optimised PECVD SiC as the capping and sealing material, imparting harsh environment capability. This technique has been applied for the fabrication and encapsulation of a wide variety of surface- and thin-SOI...

SOI Digital Accelerometer Based on Pull-in Time Configuration

The operation principle, design, fabrication and measurement results of a quasi digital accelerometer fabricated on a thin silicon-on-insulator (SOI) substrate is presented. The accelerometer features quasi-digital output, therefore eliminating the need for analogue signal conditioning. The accelerometer can be directly interfaced to digital...

DRIE and Bonding Assisted Low Cost MEMS Processing of In-plane HAR Inertial Sensors

We present a simple, flexible and low cost MEMS fabrication process, developed using deep reactive ion etching (DRIE) and wafer bonding technologies, for manufacturing in-plane high aspect ratio (HAR) inertial sensors. Among examples, the design and fabrication results of a two axis inertial device are presented. Fabricated device thickness...

Thermo-optical delay line for optical coherence tomography

Optical Coherence Tomography (OCT) is a powerful medical imaging technology. Its ability to non-invasively probe tissues in depth with high resolution has lead to applications in many fields of medicine, with a large potential for surgical guidance. One of the technological challenges impairing faster adoption of OCT is the relative complexity...

A Pull-in Operation Mode Accelerometer

Simple optical characterisation for biomimetic micromachined silicon strain-sensing structure

This paper presents an on-going work to develop micromachined silicon-based strain sensor inspired from the campaniform sensillum of insects. We present simple optical setup for the characterisation of a membrane-in-recess structure as an early stage in mimicking the natural sensor. The microstructure is a 500 nm-thick SiO2/SiN circular membrane...

Polarization-insensitive PECVD SiC waveguides for photonic sensing

Planar silicon carbide (SiC) waveguides are proposed for fabrication on a silicon substrate with a oxide isolation layer. Using post deposition annealing it is possible to achieve low Polarization-Dependent Loss (PDL) within optical SiC waveguides fabricated using a low temperature deposition technique. Those waveguides have been successfully...