Searched for: faculty%3A%22Electrical%255C%252BEngineering%252C%255C%252BMathematics%255C%252Band%255C%252BComputer%255C%252BScience%22
(1 - 3 of 3)
- document
-
Rajaraman, V. (author), Pakula, L.S. (author), Pham, H.T.M. (author), Sarro, P.M. (author), French, P.J. (author)This paper presents a new low-cost, CMOS-compatible and robust wafer-level encapsulation technique developed using a stress-optimised PECVD SiC as the capping and sealing material, imparting harsh environment capability. This technique has been applied for the fabrication and encapsulation of a wide variety of surface- and thin-SOI...conference paper 2009
- document
-
Pakula, L.S. (author), Rajaraman, V. (author), French, P.J. (author)The operation principle, design, fabrication and measurement results of a quasi digital accelerometer fabricated on a thin silicon-on-insulator (SOI) substrate is presented. The accelerometer features quasi-digital output, therefore eliminating the need for analogue signal conditioning. The accelerometer can be directly interfaced to digital...conference paper 2009
- document
-
Wicaksono, D.H.B. (author), Pandraud, G. (author), French, P.J. (author)This paper presents an on-going work to develop micromachined silicon-based strain sensor inspired from the campaniform sensillum of insects. We present simple optical setup for the characterisation of a membrane-in-recess structure as an early stage in mimicking the natural sensor. The microstructure is a 500 nm-thick SiO2/SiN circular membrane...conference paper 2005