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Gaitas, A. (author), French, P. (author)Microcantilevers are used in a number of applications including atomic-force microscopy (AFM). In this work, piezoresistive deflection-sensing elements are integrated onto micromachined cantilevers to increase sensitivity, and reduce complexity and cost. An array of probes with 5 nm gold ultrathin film sensors on silicon substrates for high...journal article 2011